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Tokyo Electron ja:東京エレクトロン

Tokyo Electron Limited
東京エレクトロン株式会社
Company typePublic kabushiki gaisha
TYO: 8035
IndustryElectronics and ICT
PredecessorSakura Yoko KK (桜洋行株式会社)founded on April 6, 1951
FoundedNovember 11, 1963 (as Tokyo Electron Laboratories, Inc.)
FounderTokuo Kubo and Toshio Kodaka
Headquarters
Akasaka Biz Tower
5-3-1 Akasaka, Minato-ku, Tokyo 107-6325
,
Number of locations
See Research and development and manufacturing (2011)
Area served
Japan, Taiwan, North America, South Korea, Europe, Southeast Asia, and China
Key people
Tetsuro Higashi, Chairman
Hiroshi Takenaka, President
Products
ServicesField support
Increase \97.8 billion (2011)
Increase \71.9 billion (2011)
Total assetsIncrease \809.2 billion (2011)
Total equityIncrease \572.7 billion (2011)
Owner
Number of employees
10,343 (as of 2011)
DivisionsSee divisions
Subsidiaries31 consolidated subsidiaries, including Tokyo Electron Device (TYO: 2760) and Oerlikon Solar
WebsiteTokyo Electron Group Global Websites
Footnotes / references
[1][2]

Tokyo Electron Limited (東京エレクトロン株式会社, Tokyo Electron Kabushiki-gaisha, TYO: 8035[3]), or TEL, is an industrial electronics company headquartered in Akasaka, Minato-ku, Tokyo, Japan.[2] TEL is best known as a supplier of equipment to fabricate integrated circuits (IC), flat panel displays (FPD), and photovoltaic cells (PV).[2] Tokyo Electron Device (東京エレクトロンデバイス株式会社, Tokyo Electron Device Kabushiki-gaisha, TYO: 2760), or TED, is a subsidiary of TEL specializing in semiconductor devices, electronic components, networking devices, and related software.[2]

As of 2011, TEL is the largest manufacturer of IC and FPD production equipment in Japan and the third largest in the world. [2]

History

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Origins

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On November 11, 1963, Tokyo Electron Laboratories Incorporated was founded by Tokuo Kubo and Toshio Kodaka, largely funded by Tokyo Broadcasting System (TBS), with a capital of over five million yen. Later that year, their office opened in the TBS main building and began manufacturing thousands of quality-control and importing diffusion furnaces made by Thermco and selling Japanese-made car radios.[4]

In 1965, the company approached a rapidly growing business in the market, Fairchild Semiconductor Corporation, and agreed to serve as a sales agency for them, increasing their capital to twenty million yen and began exporting IC testers, IC sockets, IC connectors, and other similar computer components.[4]

They opened a new office in San Francisco, California and their new branch, Pan Electron in 1968 establishing themselves as the only stocking distributor of imported electronic components in the region.[4]

One year later, they opened their still-functioning Yokohama office and established Teltron, a major manufacturer and distributor of car stereos, expanding their headquarters to fill the entire TBS-2 building and raising their capital to 100 million yen.[4]


Shift to manufacturing

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Expansion

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Globalization

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Recent developments

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Acquisitions

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Products

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TEL's main product categories are:

  1. Semiconductor production equipment (SPE)
  2. FPD/PV production equipment
  3. Electronic components and computer networks

Semiconductor production equipment (SPE)

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TEL produces SPE for the following purposes: [2]

Thermal processing
Deposition of thin layers of dielectric material between transistors onto the silicon wafer surface in a heated low-pressure chemical vapor deposition (LPCVD) or oxidation process[5]
Photoresist coating/developing
Photoresist coating and developing to project a microscopic circuitry pattern on the wafer inphotolithography[6]
Plasma etching[7]
Dielectric Etch System, Silicon Etch System
Cleaning
Wafer surface cleaning to remove foreign particles or contaminants such as dust[8]

auto wet station, single wafer cleaning system, pre-clean system, scrubber system

Single wafer chemical vapor deposition
Deposition of thin layers of various materials, such as tungsten, tungsten silicide, titanium,titanium nitride, and tantalum oxide[9]
Wafer probing
Wafer probers for testing the functionality and performance of each die on the wafer[10]
Material modification/doping
Surface modification and doping using gas cluster ion beam (GCIB) technology[11]
Corrective etching/trimming
Corrective etching and trimming of thin films such as silicon, silicon nitride, silicon dioxide, aluminium nitride, and metals[12]
Integrated metrology[13]
(co-developed by TEL and KLA Tencor)

In particular, TEL leads the markets of photoresist coater/developers and thermal processing systems.[1]

FPD/PV production equipment

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FPD photoresist coater/developing
FPD plasma etching/plasma ashing
Plasma CVD for thin-film solar cells
End-to-end thin-film solar cell solutions
TEL is the sole Asia/Oceania representative of Oerlikon Solar, a Swiss manufacturer of thin-film solar cells.[1]


Electronic components and computer networks

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Tokyo Electron Device (TED) handles this product category.

Semiconductor products
Other electronic components
Networking devices
Software

Services

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Organization

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Management

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Divisions

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Consolidated subsidiaries

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The Tokyo Electron Group consists of TEL, TED, Oerlikon Solar, and the other consolidated subsidiaries. [1]

Tokyo Electron Device

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sales

Others

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Header text Header text Header text Header text Header text Header text
Example Example Example Example Example Example
Example Example Example Example Example Example
Example Example Example Example Example Example
Example Example Example Example Example Example
Example Example Example Example Example Example
Example Example Example Example Example Example
  • Tokyo Electron Yamanashi Limited

Manufacture and development

  • Tokyo Electron Kyushu Limited

Manufacture and development

  • Tokyo Electron Tohoku Limited

Manufacture and development

  • Tokyo Electron Miyagi Limited

Manufacture and development

  • Tokyo Electron TS Limited

Manufacture and development

  • Tokyo Electron Technology Development Institute, Inc.

Manufacture and development

  • Tokyo Electron Software Technologies Limited

Development

  • Tokyo Electron PV Limited

Development

  • Tokyo Electron FE Limited

Field support

  • Tokyo Electron BP Limited

logistics, leasing, facility management, etc.

  • Tokyo Electron Agency Limited

nonlife insurance

  • Pan Electron Limited

sales

Korea, Taiwan, China, and India

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  • Tokyo Electron Korea Limited

sales and field support

  • Tokyo Electron Korea Solution Limited

field support

  • Tokyo Electron Taiwan Limited

sales and field support

  • Tokyo Electron (Kunshan) Limited

manufacture


  • Tokyo Electron (Shanghai) Limited

sales and field support

  • Tokyo Electron (Shanghai) Logistic Center Limited

logistics

  • Tokyo Electron Device Hong Kong Limited

sales

  • Tokyo Electron Device Singapore Pte. Ltd.

sales

  • Tokyo Electron India Private Limited

sales and field support

North America

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  • Tokyo Electron U.S. Holdings, Inc.

holding company

  • Tokyo Electron America, Inc.

sales and field support

  • Tokyo Electron Massachusetts, LLC

Manufacture and development

  • Timbre Technologies, Inc.

development

  • TEL Technology Center, America, LLC

development

  • TEL Epion Inc.

development

  • TEL Venture Capital, Inc.

venture capital

Europe and Israel

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  • Tokyo Electron Europe Limited ? Head Office (Crawley, England)
    German Branch
    Italian Branch
    Netherlands Branch
    Irish Branch
    French Branch

sales and field support

  • Tokyo Electron Israel Limited

field support

Manufacturing

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Research and development

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TEL

Tokyo Electron Technology Development Institute, Inc.


Tokyo Electron PV Limited


TEL Technology Center, America, LLC

Japan

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TEL's Technology Development Center and Leading-edge Process Development Center is located in Nirasaki, Yamanashi. TEL also has the Kansai Technology Center in Amagasaki, Hyogo Prefecture and the Sendai Design and Development Center in Sendai, Miyagi Prefecture. Tokyo Electron Technology Development Institute TEL Technology Center, Tsukuba

Korea

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Process Technology Center Tokyo Electron Korea Solution

Taiwan

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TEL Technology Center, Taiwan

United States

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TEL Technology Center, America, LLC in Albany, New York is the R&D center in the United States.

SEMATECH in Albany, New York


Belgium

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TEL is one of the partners of IMEC, a microelectronics and nanoelectronics research center in Leuven, Belgium.[1]

Recognition

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Sponsorship

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TEL supports association football in Japan by sponsoring the J. League as a whole and the football club Ventforet Kofu based in Kofu and Nirasaki as well as the rest of Yamanashi Prefecture.

The company has acquired naming rights of two multipurpose halls:


See also

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References

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  1. ^ a b c d e "Annual Report 2011" (PDF). Tokyo Electron Limited. March 31, 2011. Retrieved February 23, 2012.
  2. ^ a b c d e f "Fact Book 2011" (PDF). Tokyo Electron Limited. March 31, 2011. Retrieved February 23, 2012.
  3. ^ finance
  4. ^ a b c d "Explore Our History". Tokyo Electron Limited. Retrieved February 23, 2012.
  5. ^ "Thermal Processing". Tokyo Electron Limited. Retrieved February 23, 2012.
  6. ^ "Coater/Developers". Tokyo Electron Limited. Retrieved February 23, 2012.
  7. ^ "Etch Systems". Tokyo Electron Limited. Retrieved February 23, 2012.
  8. ^ "Surface Preparation Systems". Tokyo Electron Limited. Retrieved February 23, 2012.
  9. ^ "Single Wafer Deposition". Tokyo Electron Limited. Retrieved February 23, 2012.
  10. ^ "Wafer Probe Systems". Tokyo Electron Limited. Retrieved February 23, 2012.
  11. ^ "Material Modification/Doping". Tokyo Electron Limited. Retrieved February 23, 2012.
  12. ^ "Corrective Etching/Trimming". Tokyo Electron Limited. Retrieved February 23, 2012.
  13. ^ "Integrated Metrology Systems". Tokyo Electron Limited. Retrieved February 23, 2012.
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