Henry I. Smith
Henry Isaac Smith | |
|---|---|
| Born | May 26, 1937 |
| Education |
|
| Known for |
|
| Awards | |
| Scientific career | |
| Fields | Physics, Nanotechnology |
| Institutions | |
Henry I. Smith (born on May 26, 1937, in Jersey City, New Jersey) is an American inventor and physicist. Smith co-founded two MIT spin-offs, LumArray, Inc., and Sublimit, LLC, further extending the practical applications of his research.[1]
Career and research contributions
[edit]Smith began his professional career as a First Lieutenant in the Air Force Cambridge Research Laboratories from 1960 to 1963. Following his military service, he joined Boston College as an Assistant Professor of Physics. In 1968, he transitioned to the Massachusetts Institute of Technology.[2]
At MIT, Smith initially worked at Lincoln Laboratory. He later founded the Nanostructures Laboratory in the Research Laboratory of Electronics at MIT, where he served as Director from 1977 to 2007.[3]
Smith is credited with numerous inventions, including the attenuated phase-shift mask and liquid-immersion lithography.[4]
Awards and honors
[edit]- IEEE Robert N. Noyce Medal in 2017[5]
- Member of the National Academy of Engineering and a Fellow of the American Academy of Arts and Sciences
- Member of the IEEE
References
[edit]- ^ "Henry Smith". web.mit.edu. Retrieved October 21, 2024.
- ^ "Oral history interview with Henry I. Smith". Science History Institute Digital Collections. Retrieved October 21, 2024.
- ^ "NanoStructures Laboratory". www.rle.mit.edu.
- ^ "Attenuated phase shift mask materials for 248 and 193 nm lithography". pubs.aip.org.
- ^ "2017 IEEE Honors: IEEE Robert N. Noyce Medal - Henry I. Smith | IEEETV". ieeetv.ieee.org. June 4, 2017. Retrieved October 21, 2024.