Hans Pfeiffer
Hans Pfeiffer is a physicist best known for his contribution to the development of electron beam lithography.
Life
[edit]Dr. Pfeiffer received his Ph.D. from Technische Universität Berlin in 1967 and joined IBM the following year. During his career he established a world class team and led the development of several generations of IBM's electron-beam lithography systems. He is recognized for building the industry's first shaped beam lithography systems.
Dr. Pfeiffer was elected IBM Fellow in 1985.
References
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