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Description
English: US Patent issued to de Groot and owned by the w:Zygo Corporation. In the figure, 110 is the light source, 164 the detector. The beamsplitter 120 produces the two arms of the interferometer. The measurement arm 140 contains an objective lens 141 for imaging the surface to be studied 152. The reference arm 130 contains complementary optics to compensate for aberrations produced in the measurement arm.
Source US Patent issued to de Groot and owned by the w:Zygo Corporation.
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May or may not be in the public domain
 In general, the contents of United States patents are in the public domain.

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A portion of the disclosure of this patent document contains material which is subject to (copyright or mask work) protection. The (copyright or mask work) owner has no objection to the facsimile reproduction by any­one of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all (copyright or mask work) rights whatsoever.

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Date/TimeThumbnailDimensionsUserComment
current20:30, 18 September 2007Thumbnail for version as of 20:30, 18 September 2007460 × 588 (36 KB)Ckott72US Patent issued to de Groot and owned by the Zygo Corporation.

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