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Summary

Description
English: Bimorph microcantilever actuator
Date
Source https://doi.org/10.3390/s17112510 Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing
Author Seok-Won Kang, Joe Fragala, Su-Ho Kim and Debjyoti Banerjee

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Captions

Bimorph microcantilever actuator

In dieser Datei abgebildete Objekte

depicts

1 September 2017

image/png

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current13:33, 10 July 2024Thumbnail for version as of 13:33, 10 July 20241,706 × 1,218 (376 KB)Muhammadrehan645Uploaded a work by Seok-Won Kang, Joe Fragala, Su-Ho Kim and Debjyoti Banerjee from https://doi.org/10.3390/s17112510 with UploadWizard

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