English: Patent search was done on 2023-02-15 with Questel-Orbit database using search string : ((CU OR COPPER) S (ELECTROPLAT+ OR ELECTRODEPOSIT+ OR FILLING ) S (BOTTOM_UP OR SUPER_CONFORMAL OR DAMASCENE OR INTER_CONNECT OR INTER_CONNECTS OR MICROVIA OR MICROVIAS OR SUB_MICRON OR NANOMETER))/TI/AB/OBJ/ADB/ICLM/CLMS/TX AND semiconductors/TECD. Non-patent searches were done on the same day with Web of Science, SciFinder-N, and lens.org .
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