File:Spacer trimming.png

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Summary

Description

English: Shows the spacer trimmed to smaller width (e.g., by plasma) after spacer is etched and mandrel is removed.

References

US Patent 4776922, assigned to IBM.
C. Kodama et al., IEEE Trans. CAD Integ. Circ. and Syst., vol. 34, 753 (2015).
US Patent 9048292, assigned to Micron.

Date

2016-01-08

(2016-01-08 (first version); 2016-01-18 (last version))

Source PowerPoint drawing

Author Guiding light

Other versions

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Licensing

Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:

Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.

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Attribution: Guiding light at en.wikipedia

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Original upload log

The original description page was here. All following user names refer to en.wikipedia.

Date/Time	Dimensions	User	Comment
2016-01-18 10:53	950×569× (18354 bytes)	Guiding light
2016-01-09 03:51	950×563× (17240 bytes)	Guiding light
2016-01-08 12:17	950×563× (17029 bytes)	Guiding light	Uploading a self-made file using [[Wikipedia:File_Upload_Wizard\|File Upload Wizard]]

File history

Click on a date/time to view the file as it appeared at that time.

	Date/Time	Dimensions	User	Comment
current	13:39, 21 April 2016	1,157 × 484 (17 KB)	Guiding light	removed picture
	13:11, 13 April 2016	1,260 × 822 (9 KB)	Guiding light	modified upper picture
	13:06, 13 April 2016	1,260 × 822 (9 KB)	Guiding light	Incorporated second picture example
	12:53, 13 April 2016	1,157 × 484 (17 KB)	Guiding light	New picture
	06:16, 13 March 2016	950 × 569 (18 KB)	OgreBot	(BOT): Reverting to most recent version before archival
	06:16, 13 March 2016	950 × 563 (17 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-01-09 03:51:57 by Guiding light
	06:16, 13 March 2016	950 × 563 (17 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-01-08 12:17:00 by Guiding light
	10:18, 28 February 2016	950 × 569 (18 KB)	FastilyClone	Transferred from enwp