English: SEM photograph of black silicon with slanted nanocones, produced with oblique-angled RIE.
Date
Source
Monolithic Integrations of Slanted Silicon Nanostructures on 3D Microstructures and Their Application to Surface-Enhanced Raman Spectroscopy
The Journal of Physical Chemistry C 2012 116 (45), 24161-24170
DOI: 10.1021/jp308162c
Author
Zhida Xu, Jing Jiang, Manas Ranjan Gartia, and Gang Logan Liu
Monolithic Integrations of Slanted Silicon Nanostructures on 3D Microstructures and Their Application to Surface-Enhanced Raman Spectroscopy
Zhida Xu, Jing Jiang, Manas Ranjan Gartia, and Gang Logan Liu
The Journal of Physical Chemistry C 2012 116 (45), 24161-24170
DOI: 10.1021/jp308162c
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