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Summary

Description Self-aligned blocking makes use of lines of different materials which are cut by separate etches. The selective etches allow the lines to cross lines of different materials. The loop end cut/trim is at the right. Ref.: N. Mohanty et al., Proc. SPIE 10147, 1014704 (2017). Here, the "core" features are those features which support the final spacer, while the "gap" features are those which located in the remaining gaps between final spacers.
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Source Excel drawing
Author Guiding light

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Date/Time Dimensions User Comment
2019-03-03 06:03:53 418 × 1045 Guiding light
2019-03-03 04:37:35 418 × 1045 Guiding light
2018-10-05 12:53:49 529 × 2234 Guiding light
2018-09-30 07:00:33 528 × 2234 Guiding light
2018-09-29 16:25:37 528 × 2234 Guiding light
2018-08-25 09:51:40 528 × 2234 Guiding light Illustrates process flow
2018-03-10 08:22:23 605 × 581 Guiding light
2017-12-24 05:01:46 605 × 581 Guiding light
2017-12-22 12:22:15 476 × 596 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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22 December 2017

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current15:56, 2 April 2020Thumbnail for version as of 15:56, 2 April 2020418 × 1,045 (23 KB)Hippymoose17Transferred from en.wikipedia (MTC!) (1.1.0)

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