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Summary

Description
English: Self-aligned litho-etch-litho-etch (SALELE) involves the use of spacers (grey) to help align trenches (red) patterned after earlier trenches (blue). The trenches are cut at different stages (yellow, purple). [1][2]
Date
Source Own work
Author Guiding light

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References

  1. SALELE double patterning for 7nm and 5nm nodes
  2. Y. Drissi et al., Proc. SPIE 10962, 109620V (2019).

Captions

Plan view of SALELE process steps, taken together

Items portrayed in this file

depicts

24 March 2021

File history

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Date/TimeThumbnailDimensionsUserComment
current01:08, 24 March 2021Thumbnail for version as of 01:08, 24 March 2021299 × 149 (2 KB)Guiding lightUploaded own work with UploadWizard

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