File:Immersion lithography illustration.svg
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Original file (SVG file, nominally 433 × 290 pixels, file size: 8 KB)
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Summary
| Description |
English: Illustration of Immersion lithography. |
| Date | (UTC) |
| Source | Own work |
| Author | Oleg Alexandrov |
| Other versions |
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| SVG development |  This diagram was created with Inkscape, or with something else.  This diagram uses embedded text that can be easily translated using a text editor. |
Licensing
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I, the copyright holder of this work, release this work into the public domain. This applies worldwide. In some countries this may not be legally possible; if so: I grant anyone the right to use this work for any purpose, without any conditions, unless such conditions are required by law. |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 02:52, 20 July 2007 | | 433 × 290 (8 KB) | Oleg Alexandrov | tweak |
| 02:50, 20 July 2007 |  | 433 × 290 (7 KB) | Oleg Alexandrov | {{Information |Description= Illustration of en:Immersion lithography |Source=self-made with en:Inkscape |Date= ~~~~~ |Author= Oleg Alexandrov }} {{PD-self}} Category:Microlithography |
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