English: Honeycomb structure patterning for density tripling using spacers on a triangular lattice, naturally fitting the ~7F2 form factor of DRAM cells. The blue dots are the mandrels, and the green dots are defined by the gray spacers on the mandrels. Ref.: J. M. Park et al., IEDM 2015; US Patent 8541316.
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue
to share – to copy, distribute and transmit the work
to remix – to adapt the work
Under the following conditions:
attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.