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File:H and V shadowing across EUV slit.png

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H_and_V_shadowing_across_EUV_slit.png (565 × 263 pixels, file size: 16 KB, MIME type: image/png)

Summary

Description
English: Horizontal and vertical lines exhibit different shadowing across the slit of an EUV scanner. Vertical lines have less severe but a wider range of shadowing than horizontal lines.[1] The smaller pitch has worse shadowing in all cases.
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Author Guiding light

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References

  1. Horizontal, Vertical, and Slanted Line Shadowing Across Slit in EUV Lithography Systems

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7 January 2022

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Date/TimeThumbnailDimensionsUserComment
current15:55, 27 January 2022Thumbnail for version as of 15:55, 27 January 2022565 × 263 (16 KB)Guiding lightcurve label edit
06:19, 25 January 2022Thumbnail for version as of 06:19, 25 January 2022560 × 288 (16 KB)Guiding lightupdated graphs
23:53, 7 January 2022Thumbnail for version as of 23:53, 7 January 2022944 × 271 (92 KB)Guiding lightUploaded own work with UploadWizard

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