File:HPCVD chamber.JPG
Original file (1,536 × 2,048 pixels, file size: 397 KB, MIME type: image/jpeg)
Summary
[edit]The reactor chamber of laboratory-scale Hybrid Physical-Chemical Vapor Deposition (HPCVD) system in the Pennsylvania State University, US. The stainless steel susceptor sits on a quartz rod inside the water-cooled chamber. During deposition, it will be heated up by the inductive heating coil (copper tubing outside the chamber). The Silicon carbide (SiC) substrate and magnesium pellets are on the top of the susceptor
Licensing
[edit]Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. |
| This work is licensed under the Creative Commons Attribution 3.0 License. |
This file is a candidate to be copied to Wikimedia Commons.
Any user may perform this transfer; refer to Wikipedia:Moving files to Commons for details. If this file has problems with attribution, copyright, or is otherwise ineligible for Commons, then remove this tag and DO NOT transfer it; repeat violators may be blocked from editing. Other Instructions
| |||
|
File history
Click on a date/time to view the file as it appeared at that time.
Date/Time | Thumbnail | Dimensions | User | Comment | |
---|---|---|---|---|---|
current | 04:15, 14 December 2007 | 1,536 × 2,048 (397 KB) | Wqdai (talk | contribs) | The reactor chamber of Hybrid Physical-Chemical Vapor Deposition (HPCVD) system in the Pennsylvania State University, US. The picture was taken in 2007. |
You cannot overwrite this file.
File usage
The following page uses this file: