File:Grid selection by Spacer patterning.png
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Summary
| Description |
English: This grid location selection approach is an application of crossed multiple patterning layers (US Patent 9240329). Top: Intersecting lines from spacer patterning designate locations for pattern formation at points of intersection of blue and red lines. The blue lines represent the already patterned metal lines to be cut. Bottom: An additional round of spacer patterning may select those intersection locations which will be used for pattern formation. This particular example is based on the spacer-based method of US Patent 8697538. The orange tint indicates the core features, while the green tint indicates the gap features. Diagonal selection patterns are presented in US20150179513 (patent application). |
| Date | |
| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-11-25 05:46:33 | 410 × 554 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:23, 20 August 2019 | | 410 × 554 (15 KB) | Dave louis john | Transferred from en.wikipedia (MTC!) (1.1.0) |
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