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Description
English: Bonding of Si wafer to glass (l) or Si (r) wafer coated with Au/Al layer
Source G. Gerlach and W. Dötzel, Introduction to Microsystem Technology: A Guide for Students (Wiley Microsystem and Nanotechnology) (2008)
Author Fraunhofer ENAS, D. Neumann
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Attribution: Fraunhofer ENAS
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current11:52, 10 April 2011Thumbnail for version as of 11:52, 10 April 2011954 × 190 (9 KB)Enaswiki{{Information |Description ={{en|1=Bonding of Si wafer to glass (l) or Si (r) wafer coated with Au/Al layer}} |Source ={{own}} |Author =Enaswiki |Date = |Permission ={{cc-by-sa-3.0-de|Fraunhofer ENAS}} |o

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