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Description
English: Scheme of anodic bonding procedure. The top tool works as a cathode and the chunk as anode. The process parameter are bond voltage UB, current limitation IB and bond temperature TB.
Deutsch: Schematische Darstellung des anodischen Bondprozesses. Die Prozessparameter sind die Bondspannung UB, die Strombegrenzung IB und die Bondtemperatur TB.
Source S. Mack, Eine vergleichende Untersuchung der physikalisch-chemischen Prozesse an der Grenzschicht direkt und anodischer verbundener Festkörper (1997)
Author Fraunhofer ENAS, D. Neumann
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current11:49, 10 April 2011Thumbnail for version as of 11:49, 10 April 2011978 × 408 (17 KB)Enaswiki{{Information |Description ={{en|1=Scheme of anodic bonding procedure. The top tool works as a cathode and the chunk as anode. The process parameter are bond voltage U<sub>B</sub>, current limitation I<sub>B</sub> and bond temperature T<sub>B</sub>.}}

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