File:64 nm pitch EUV shot noise.png
No higher resolution available.
64_nm_pitch_EUV_shot_noise.png (142 × 138 pixels, file size: 25 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description |
English: A set of holes patterned at 64 nm pitch shows significant effects of shot noise with an EUV dose of just over 10 mJ/cm2. A larger dose would result in the same range of variation over a larger sample size. Ref.: W. Gao et al., Proc. SPIE 8322, 83221D (2012). |
| Date | |
| Source | Graphic editor |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: Guiding light at English Wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-07-19 04:33 | 142×138× (25918 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 08:21, 17 November 2018 | | 142 × 138 (25 KB) | Tn4196 | Transferred from en.wikipedia via #commonshelper |
File usage
The following page uses this file:
Global file usage
The following other wikis use this file:
- Usage on es.wikipedia.org
